IR-Fourier spectrometer FSM1201P
Specialized IR-Fourier spectrometer FSM1201P is a specialized automated measuring complex based on the universal Fourier spectrometer FSM1201. It is equipped with a two-coordinate measuring table and allows you to automatically measure the parameters of silicon wafers at points specified by the operator for wafers with a diameter of up to 200 mm. The process of obtaining spectra, their processing and control of the movement of the wafer are fully automated. The travel route is selected from standard configurations (1, 5 and 9 points) or specified by the operator. The measurement results are automatically logged and entered into the database. Main controlled parameters: Interstitial oxygen concentration; Thickness of epitaxial layers of n-n+ and p-p+ type silicon structures; Concentration of phosphorus in FSS layers and boron/phosphorus in BFSS layers. Features: High sensitivity. The record signal-to-noise ratio compared to conventional IR spectrometers makes it possible to reduce the detection threshold of controlled impurities by an order of magnitude and increase the accuracy of concentration determination. High performance. The time for obtaining a spectrum at resolutions and photometric accuracy that meets the requirements of the standards does not exceed 15...20 seconds. This makes it possible to continuously monitor wafers and structures during the production process, and also allows you to study the heterogeneity of wafers by measuring the distribution of the controlled parameter. Reliability of the analysis. Analysis and identification of spectra are carried out automatically using libraries of standard spectra included in the spectrometer database. The likelihood of subjective operator errors is reduced. Non-contact measurements. During the measurement process there are no mechanical impacts on the surface of the plate. Automation of measurements. Manba: https://www.nv-lab.ru/catalog_info.php?ID=4889
- Parameter: Value
- Spectral range, cm-1: 400…7800
- Spectral resolution, cm-1: 1, 2, 4
- Diameter of the light spot on the sample, mm: 6
- Plate sizes, mm: 76, 100, 125, 150, 200
- Table positioning accuracy, mm: 0.5
- Power, V/Hz: 220/50
- Power consumption, W, no more: 95
- Dimensions, mm, no more: 670×650×250
- Weight, kg, no more: 37
- Measurement time, sec: 30…60